optimization of the process for sol-gel derived zno:al thin films for transparent conducting oxide applications
abstract
transparent and conducting al-doped zno thin films with c-axis-preferred orientation were
prepared on glass substrate via sol-gel route. the physical, optical and electrical properties were
investigated to determine an optimal withdrawal speed, aluminum source and treatment in order
to obtain a smooth, dense, highly crystalline, conductive and transparent thin film with a high
figure of merit for transparent conducting oxide applications. an optimal withdrawal speed was
found to be 2.5 cm/min. optimal aluminum source and concentration was found to be 0.5 at.%
using aluminum chloride hexahydrate. an additional treatment in an n2 environment was found
to be the best method to improve the electrical properties of the films while maintaining high
crystallinity and transparency.